Publications

  • 2022

  • Mao Wang, Ye Yu, Slawomir Prucnal, Yonder Berencén, Mohd Saif Shaikh, Lars Rebohle, Muhammad Bilal Khan, Vitaly Zviagin, René Hübner, Alexej Pashkin, Artur Erbe, Yordan M. Georgiev, Marius Grundmann, Manfred Helm, Robert Kirchner, Shengqiang Zhou, "Mid- and far-infrared localized surface plasmon resonances in chalcogen-hyperdoped silicon", In Nanoscale, Royal Society of Chemistry (RSC), 2022. [doi] [Bibtex & Downloads]
  • 2020

  • Ye Yu, Daniel Schletz, Johanna Reif, Felix Winkler, Matthias Albert, Andreas Fery, Robert Kirchner, "Influences on Plasmon Resonance Linewidth in Metal-Insulator-Metal Structures Obtained via Colloidal Self-Assembly", In ACS Applied Materials & Interfaces, American Chemical Society (ACS), vol. 12, no. 50, pp. 56281–56289, Dec 2020. [doi] [Bibtex & Downloads]
  • Robert Kirchner, Volker Neumann, Felix Winkler, Carsten Strobel, Sandra Völkel, André Hiess, Dimitrios Kazazis, Ulrich Künzelmann, Johann Wolfgang Bartha, "Anisotropic Etching of Pyramidal Silica Reliefs with Metal Masks and Hydrofluoric Acid", In Small, Wiley, vol. 16, no. 43, pp. 2002290, Oct 2020. [doi] [Bibtex & Downloads]
  • Robert Kirchner, Arne Schleunitz, Ran Zhang, Helmut Schift, "Smart Origination and Functional Replication: Thermal Reflow and Innovative 3D Structures", In Journal of Photopolymer Science and Technology, Technical Association of Photopolymers, Japan, vol. 32, no. 6, pp. 799–804, Jan 2020. [doi] [Bibtex & Downloads]
  • 2017

  • Corinna Kaspar, Jörg Butschke, Mathias Irmscher, Stephan Martens, Holger Sailer, Robert Kirchner, Vitaliy A. Guzenko, Helmut Schift, Joachim N. Burghartz, "Adjustable sidewall slopes by electron-beam exposure layout", In Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, American Vacuum Society, vol. 35, no. 6, pp. 06G501, Nov 2017. [doi] [Bibtex & Downloads]
  • Roberto Fallica, Dimitrios Kazazis, Robert Kirchner, Anja Voigt, Iacopo Mochi, Helmut Schift, Yasin Ekinci, "Lithographic performance of ZEP520A and mr-PosEBR resists exposed by electron beam and extreme ultraviolet lithography", In Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, American Vacuum Society, vol. 35, no. 6, pp. 061603, Nov 2017. [doi] [Bibtex & Downloads]
  • Robert Kirchner, Roel Hoekstra, Nachiappan Chidambaram, Helmut Schift, "Depth-profiling of vertical material contrast after VUV exposure for contact-free polishing of 3D polymer micro-optics", In Proceeding: 33rd European Mask and Lithography Conference (Uwe F.W. Behringer and Jo Finders), SPIE, Sep 2017. [doi] [Bibtex & Downloads]
  • Roberto Fallica, Robert Kirchner, Helmut Schift, Yasin Ekinci, "High-resolution grayscale patterning using extreme ultraviolet interference lithography", In Microelectronic Engineering, Elsevier BV, vol. 177, pp. 1–5, Jun 2017. [doi] [Bibtex & Downloads]
  • Helmut Schift, Nachiappan Chidambaram, Mirco Altana, Robert Kirchner, "Selective surface smoothening of 3D micro-optical elements", SPIE Proceedings (Christopher Bencher and Joy Y. Cheng), SPIE, Mar 2017. [doi] [Bibtex & Downloads]
  • Nachiappan Chidambaram, Robert Kirchner, Roberto Fallica, Libo Yu, Mirco Altana, Helmut Schift, "Selective Surface Smoothening of Polymer Microlenses by Depth Confined Softening", In Advanced Materials Technologies, Wiley, vol. 2, no. 5, pp. 1700018, Mar 2017. [doi] [Bibtex & Downloads]
  • Robert Kirchner, Nachiappan Chidambaram, Mirco Altana, Helmut Schift, "How post-processing by selective thermal reflow can reduce the roughness of 3D lithography in micro-optical lenses", In Proceeding: Laser 3D Manufacturing IV (Bo Gu and Henry Helvajian and Alberto Piqué and Corey M. Dunsky and Jian Liu), SPIE, Feb 2017. [doi] [Bibtex & Downloads]
  • 2013

  • Andreas Finn, Bo Lu, Robert Kirchner, Xaver Thrun, Karola Richter, Wolf-Joachim Fischer, "High aspect ratio pattern collapse of polymeric UV-nano-imprint molds due to cleaning", In Microelectronic Engineering, Elsevier BV, vol. 110, pp. 112–118, Oct 2013. [doi] [Bibtex & Downloads]
  • G. Scheunert, V. Hoffmann, R. Kullock, J. R. Whyte, R. Kirchner, S. Grafström, W.-J. Fischer, L. M. Eng, "Utilizing Dog-Boning to Build up High-Aspect-Ratio Nanofences", In Journal of The Electrochemical Society, The Electrochemical Society, vol. 161, no. 1, pp. D26–D30, Oct 2013. [doi] [Bibtex & Downloads]
  • Lichao Teng, Matthias Plötner, Alexander Türke, Barbara Adolphi, Andreas Finn, Robert Kirchner, Wolf-Joachim Fischer, "Nanoimprint assisted inkjet printing to fabricate sub-micron channel organic field effect transistors", In Microelectronic Engineering, Elsevier BV, vol. 110, pp. 292–297, Oct 2013. [doi] [Bibtex & Downloads]

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